Browsing Presentations by imec author "e170285c295157d4f1d7464c42358e6bbc20c849"
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Improvement in post-Chemical Mechanical Planarization cleaning process for Ru interconnects
Harada, Ken; Shibata, Toshiaki; Kawase, Yasuhiro; Teugels, Lieve; Heylen, Nancy; Struyf, Herbert (2019) -
Investigation of chemical mechanical planarization (CMP) and post-CMP cleanig for Molybdenum
Harada, Ken; Philipsen, Harold; Teugels, Lieve; Struyf, Herbert (2019)