Browsing Presentations by imec author "e9da1d138d38d7fe16b44d1edeff0e07658b3933"
Now showing items 1-5 of 5
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Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH Ru
Adelmann, Christoph; Popovici, Mihaela Ioana; Groven, Benjamin; Moens, Kristof; Meersschaut, Johan; Franquet, Alexis; Swerts, Johan; Delabie, Annelies; Van Elshocht, Sven (2014) -
Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Tomczak, Yoann; Caymax, Matty; Radu, Iuliana (2016) -
Nucleation behaviour of PEALD WS2 on Al2O3 and SiO2
Groven, Benjamin; Nalin Mehta, Ankit; Meersschaut, Johan; Vanhaeren, Danielle; Bender, Hugo; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2016) -
Structural and low-loss characterization of synthetic 2D-TMDs
Nalin Mehta, Ankit; Groven, Benjamin; Chiappe, Daniele; Favia, Paola; Bender, Hugo; Delabie, Annelies; Caymax, Matty; Vandervorst, Wilfried (2018) -
The sapphire surface structure and its impact on MOCVD grown wafer-scale MoS2 uniformity and MOSFET variability
Shi, Yuanyuan; Groven, Benjamin; Serron, Jill; Han, Han; Banerjee, Sreetama; Wu, Xiangyu; Ludwig, Jonathan; Asselberghs, Inge; Lin, Dennis; Morin, Pierre; Caymax, Matty; Radu, Iuliana (2019)