Browsing Presentations by imec author "ee06665e52a0ddc331b6e752cb501d5f75785130"
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Acoustic manipulation capabilities of a multifrequency aluminium nitride based PMUT
Weekers, Bart; Billen, Margo; Rochus, Veronique; Rottenberg, Xavier; Lagae, Liesbet (2020) -
Electrode design for efficient excitation of vibrational modes in an ALN based PMUT
Weekers, Bart; Billen, Margo; Tabruyn, Dries; Haouari, Rachid; Gijsenbergh, Pieter; Rochus, Veronique; Rottenberg, Xavier; Lagae, Liesbet (2020)