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Electrode design for efficient excitation of vibrational modes in an ALN based PMUT

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2 since deposited on 2021-10-29
Acq. date: 2026-06-27

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2097 since deposited on 2021-10-29
Acq. date: 2026-06-27

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Downloads

2 since deposited on 2021-10-29
Acq. date: 2026-06-27

Views

2097 since deposited on 2021-10-29
Acq. date: 2026-06-27

Citations