Publication:

Electrode design for efficient excitation of vibrational modes in an ALN based PMUT

Date

2020
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dc.contributor.authorWeekers, Bart
dc.contributor.authorBillen, Margo
dc.contributor.authorTabruyn, Dries
dc.contributor.authorHaouari, Rachid
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorLagae, Liesbet
dc.contributor.imecauthorWeekers, Bart
dc.contributor.imecauthorBillen, Margo
dc.contributor.imecauthorTabruyn, Dries
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.orcidimecWeekers, Bart::0000-0001-5949-8411
dc.contributor.orcidimecBillen, Margo::0000-0002-0189-7388
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.date.accessioned2021-10-29T07:57:10Z
dc.date.available2021-10-29T07:57:10Z
dc.date.embargo9999-12-31
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36315
dc.identifier.urlhttps://www.comsol.ch/paper/download/856831/Electrode%20Design%20for%20Efficient%20Excitation%20of%20Vibrational%20Modes%20in%20an%20AlN%20based%20PMUT.pdf
dc.source.conferenceCOMSOL Conference 2020 Europe
dc.source.conferencedate14/10/2020
dc.source.conferencelocationonline online
dc.title

Electrode design for efficient excitation of vibrational modes in an ALN based PMUT

dc.typeOral presentation
dspace.entity.typePublication
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