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Electrode design for efficient excitation of vibrational modes in an ALN based PMUT
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Acq. date: 2025-12-15
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Acq. date: 2025-12-15
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2 since deposited on 2021-10-29
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2090 since deposited on 2021-10-29
1last month
Acq. date: 2025-12-15
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