Sputtering phenomena of CoSi2 under low energy oxygen bombardment

View/open

52.pdf (221.3Kb)

Metadata

Show full item record

Authors

Brijs, Bert; De Coster, Walter; Bender, Hugo; Alay, Josep Lluis; Osiceanu, Petre; Vandervorst, Wilfried

Issue

1_4

Journal

Nuclear Instruments and Methods B

Volume

85

Title

Sputtering phenomena of CoSi2 under low energy oxygen bombardment

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles