Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Publication:
Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Copy permalink
Date
2002
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Besling, Wim
;
Young, Edward
;
Conard, Thierry
;
Zhao, Chao
;
Carter, Richard
;
Vandervorst, Wilfried
;
Caymax, Matty
;
De Gendt, Stefan
;
Heyns, Marc
;
Maes, Jos
;
Tuominen, Marko
;
Haukka, S.
Journal
Journal of Non-Crystalline Solids
Abstract
Description
Metrics
Views
1984
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2026-01-08
Citations
Metrics
Views
1984
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2026-01-08
Citations