Authors

Besling, Wim; Young, Edward; Conard, Thierry; Zhao, Chao; Carter, Richard; Vandervorst, Wilfried; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko; Haukka, S.

Issue

1

Journal

Journal of Non-Crystalline Solids

Volume

303

Title

Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

Publication type

Journal article