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Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

dc.contributor.authorBesling, Wim
dc.contributor.authorYoung, Edward
dc.contributor.authorConard, Thierry
dc.contributor.authorZhao, Chao
dc.contributor.authorCarter, Richard
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaes, Jos
dc.contributor.authorTuominen, Marko
dc.contributor.authorHaukka, S.
dc.date.accessioned2021-10-14T21:08:45Z
dc.date.available2021-10-14T21:08:45Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6008
dc.sourceIIOimport
dc.titleCharacterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage123
dc.source.endpage133
dc.source.journalJournal of Non-Crystalline Solids
dc.source.issue1
dc.source.volume303
imec.availabilityPublished - imec


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