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AFMs reveal 3-D semiconductor features

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorChollet, Frederic
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T13:05:15Z
dc.date.available2021-09-29T13:05:15Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/600
dc.sourceIIOimport
dc.titleAFMs reveal 3-D semiconductor features
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage41
dc.source.endpage43
dc.source.journalTest and Measurement World
dc.source.issue9
dc.source.volume15
imec.availabilityPublished - open access


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