Publication:

AFMs reveal 3-D semiconductor features

Date

1995

Journal article

Simple item page Full metadata Statistics

Files

573.pdf 419.65 KB

Author(s)

;

Chollet, Frederic

;

Vandervorst, Wilfried

Journal

Test and Measurement World

Statistics

2030 since deposited on 2021-09-29

3last month

Acq. date: 2026-10-12