Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
AFMs reveal 3-D semiconductor features
Publication:
AFMs reveal 3-D semiconductor features
Copy permalink
Date
1995
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
573.pdf
419.65 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Peter
;
Chollet, Frederic
;
Vandervorst, Wilfried
Journal
Test and Measurement World
Abstract
Description
Metrics
Views
2024
since deposited on 2021-09-29
3
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
2024
since deposited on 2021-09-29
3
last month
Acq. date: 2025-12-15
Citations