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One and two-dimensional carrier profiling in semiconductors by nano-SRP
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Authors
De Wolf, Peter
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Snauwaert, J.
;
Hellemans, L.
Conference
3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors
Title
One and two-dimensional carrier profiling in semiconductors by nano-SRP
Publication type
Proceedings paper
Embargo date
9999-12-31
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