Authors

De Wolf, Peter; Clarysse, Trudo; Vandervorst, Wilfried; Snauwaert, J.; Hellemans, L.

Conference

3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors

Title

One and two-dimensional carrier profiling in semiconductors by nano-SRP

Publication type

Proceedings paper

Embargo date

9999-12-31