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Large-scale production techniques for photonic nanostructures using excimer laser replication
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Authors
Bogaerts, Wim
;
Taillaert, Dirk
;
Baets, Roel
;
Wiaux, Vincent
;
Beckx, Stephan
Conference
Integrated Photonics Research - IPR
Title
Large-scale production techniques for photonic nanostructures using excimer laser replication
Publication type
Proceedings paper
Embargo date
9999-12-31
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