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From ULSI to microsystems and nanotechnology

dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-14T21:11:08Z
dc.date.available2021-10-14T21:11:08Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6058
dc.sourceIIOimport
dc.titleFrom ULSI to microsystems and nanotechnology
dc.typeOral presentation
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewno
dc.source.conference8th World Micromachine Summit
dc.source.conferencedate30/04/2002
dc.source.conferencelocationMaastricht The Netherlands
imec.availabilityPublished - imec


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