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Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon

dc.contributor.authorBorzi, Raffaella
dc.contributor.authorFedders, P. A.
dc.contributor.authorChan, P. H.
dc.contributor.authorHerberg, J.
dc.contributor.authorLeopold, D. J.
dc.contributor.authorNorberg, R. E.
dc.date.accessioned2021-10-14T21:11:11Z
dc.date.available2021-10-14T21:11:11Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6059
dc.sourceIIOimport
dc.titleInterstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon
dc.typeJournal article
dc.contributor.imecauthorBorzi, Raffaella
dc.source.peerreviewno
dc.source.beginpage205
dc.source.endpage209
dc.source.journalJournal of Non-Crystalline Solids
dc.source.volume299
imec.availabilityPublished - imec


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