Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon

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Authors

Borzi, Raffaella; Fedders, P. A.; Chan, P. H.; Herberg, J.; Leopold, D. J.; Norberg, R. E.

Journal

Journal of Non-Crystalline Solids

Volume

299

Title

Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon

Publication type

Journal article

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