Publication:
Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon
Date
| dc.contributor.author | Borzi, Raffaella | |
| dc.contributor.author | Fedders, P. A. | |
| dc.contributor.author | Chan, P. H. | |
| dc.contributor.author | Herberg, J. | |
| dc.contributor.author | Leopold, D. J. | |
| dc.contributor.author | Norberg, R. E. | |
| dc.contributor.imecauthor | Borzi, Raffaella | |
| dc.date.accessioned | 2021-10-14T21:11:11Z | |
| dc.date.available | 2021-10-14T21:11:11Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6059 | |
| dc.source.beginpage | 205 | |
| dc.source.endpage | 209 | |
| dc.source.journal | Journal of Non-Crystalline Solids | |
| dc.source.volume | 299 | |
| dc.title | Interstitial molecular hydrogen and deuterium in PECVD and HW amorphous silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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