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Advanced characterization of high-K materials: a nuclear approach

dc.contributor.authorBrijs, Bert
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorNauwelaerts, Sophie
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorLennard, W. N.
dc.contributor.authorTerwagne, G.
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-14T21:11:34Z
dc.date.available2021-10-14T21:11:34Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6066
dc.sourceIIOimport
dc.titleAdvanced characterization of high-K materials: a nuclear approach
dc.typeJournal article
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.beginpage505
dc.source.endpage509
dc.source.journalNuclear Instruments & Methods in Physics Research B
dc.source.volume190
imec.availabilityPublished - imec


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