Advanced characterization of high-K materials: a nuclear approach

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Authors

Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre

Journal

Nuclear Instruments & Methods in Physics Research B

Volume

190

Title

Advanced characterization of high-K materials: a nuclear approach

Publication type

Journal article

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