Publication:
Advanced characterization of high-K materials: a nuclear approach
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Nauwelaerts, Sophie | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Nakajima, K. | |
| dc.contributor.author | Kimura, K. | |
| dc.contributor.author | Bergmaier, A. | |
| dc.contributor.author | Dollinger, G. | |
| dc.contributor.author | Lennard, W. N. | |
| dc.contributor.author | Terwagne, G. | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.date.accessioned | 2021-10-14T21:11:34Z | |
| dc.date.available | 2021-10-14T21:11:34Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6066 | |
| dc.source.beginpage | 505 | |
| dc.source.endpage | 509 | |
| dc.source.journal | Nuclear Instruments & Methods in Physics Research B | |
| dc.source.volume | 190 | |
| dc.title | Advanced characterization of high-K materials: a nuclear approach | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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