Advanced characterization of high-K materials: a nuclear approach

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Author(s)

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Huyghebaert, Cedric

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Nauwelaerts, Sophie

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Vandervorst, Wilfried

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Vantomme, Andre

Journal

Nuclear Instruments & Methods in Physics Research B

Metrics

1973 since deposited on 2021-10-14

Acq. date: 2025-10-23