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Ion beam analysis: the past, the present and the future

dc.contributor.authorBrijs, Bert
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T21:11:37Z
dc.date.available2021-10-14T21:11:37Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6067
dc.sourceIIOimport
dc.titleIon beam analysis: the past, the present and the future
dc.typeOral presentation
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conference17th International Conference of the Application of Accelerators in Industry - CAARI
dc.source.conferencedate12/11/2002
dc.source.conferencelocationDenton, TX USA
imec.availabilityPublished - imec


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