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Nanoindentation on low-k dielectrics
Publication:
Nanoindentation on low-k dielectrics
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brongersma, Sywert
;
Nolan, M.
;
Vervoort, Iwan
;
Maex, Karen
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1868
since deposited on 2021-10-14
Acq. date: 2026-01-09
Citations
Metrics
Views
1868
since deposited on 2021-10-14
Acq. date: 2026-01-09
Citations