Dry oxidation mechanisms of copper in trenches

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Authors

Carbonell, Laure; Ratchev, Petar; Caluwaerts, Rudy; Van Hove, Marleen; Verlinden, B.; Maex, Karen

Issue

1_4

Journal

Microelectronic Engineering

Volume

64

Title

Dry oxidation mechanisms of copper in trenches

Publication type

Journal article

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