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Compensating differences between measurement and calibration wafer in probe-tip calibrations

dc.contributor.authorCarchon, Geert
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-14T21:12:30Z
dc.date.available2021-10-14T21:12:30Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6082
dc.sourceIIOimport
dc.titleCompensating differences between measurement and calibration wafer in probe-tip calibrations
dc.typeProceedings paper
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.beginpage1837
dc.source.endpage1840 (Vol.3)
dc.source.conferenceIEEE MTT-S International Microwave Symposium Digest
dc.source.conferencedate2/06/2002
dc.source.conferencelocationSeattle, WA USA
imec.availabilityPublished - imec


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