High-Q RF-inductors on low resistivity silicon through wafer post-processing

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Authors
Carchon, Geert; De Raedt, Walter; Beyne, Eric
Conference
Proceedings 35th International Symposium on Microelectronics - IMAPS
Title
High-Q RF-inductors on low resistivity silicon through wafer post-processing
Publication type
Proceedings paper
Embargo date
9999-12-31
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