Show simple item record

Sputtering phenomena of CoSi2 under low energy oxygen bombardment

dc.contributor.authorBrijs, Bert
dc.contributor.authorDe Coster, Walter
dc.contributor.authorBender, Hugo
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorOsiceanu, Petre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:39:57Z
dc.date.available2021-09-29T12:39:57Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/60
dc.sourceIIOimport
dc.titleSputtering phenomena of CoSi2 under low energy oxygen bombardment
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage306
dc.source.endpage310
dc.source.journalNuclear Instruments and Methods B
dc.source.issue1_4
dc.source.volume85
imec.availabilityPublished - open access
imec.internalnotesPaper from the 11th International Conference on Ion Beam Analysis; July 1993; Baltonfured, Hungary


Files in this item

Thumbnail
Name:
52.pdf
Size:
221.3Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record