Authors

Brijs, Bert; De Coster, Walter; Bender, Hugo; Storm, Wolfgang; Osiceanu, Petre; Vandervorst, Wilfried

Conference

13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U

Title

RBS Analysis of Artefacts Induced by Low Energy Ion Sputtering

Publication type

Oral presentation