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Ozonated HF applications in a spray processing tool

dc.contributor.authorClaes, Martine
dc.contributor.authorRöhr, Erika
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorLagrange, Sébastien
dc.contributor.authorBergman, E.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T21:14:42Z
dc.date.available2021-10-14T21:14:42Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6113
dc.sourceIIOimport
dc.titleOzonated HF applications in a spray processing tool
dc.typeProceedings paper
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage314
dc.source.endpage321
dc.source.conferenceCleaning Technology in Semiconductor Device Manufacturing VII
dc.source.conferencedate4/09/2001
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 2001-26


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