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Technology challenges for the microelectronics end-of-the-roadmap triggering global research

dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-14T21:14:46Z
dc.date.available2021-10-14T21:14:46Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6114
dc.sourceIIOimport
dc.titleTechnology challenges for the microelectronics end-of-the-roadmap triggering global research
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference3rd Workshop on Development in Microelectronics - Role of VLSI in MEMS
dc.source.conferencedate4/12/2002
dc.source.conferencelocationNew Delhi India
imec.availabilityPublished - imec


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