Show simple item record

Technology challenges related to ultimate CMOS and the end-of-roadmap microelectronics

dc.contributor.authorClaeys, Cor
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T21:14:51Z
dc.date.available2021-10-14T21:14:51Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6115
dc.sourceIIOimport
dc.titleTechnology challenges related to ultimate CMOS and the end-of-roadmap microelectronics
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage455
dc.source.endpage470
dc.source.conferenceProceedings 17th Symposium on Microelectronics Technology and Devices - SBMicro
dc.source.conferencedate9/09/2002
dc.source.conferencelocationPorto Allegre Brazil
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 2002-8


Files in this item

Thumbnail
Name:
7028.pdf
Size:
2.058Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record