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Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles

dc.contributor.authorClarysse, Trudo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T21:15:25Z
dc.date.available2021-10-14T21:15:25Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6122
dc.sourceIIOimport
dc.titleImpact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage2407
dc.source.endpage2409
dc.source.journalApplied Physics Letters
dc.source.issue13
dc.source.volume80
imec.availabilityPublished - imec


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