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Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
Publication:
Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Caymax, Matty
;
Vandervorst, Wilfried
Journal
Applied Physics Letters
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1817
since deposited on 2021-10-14
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Acq. date: 2025-12-16
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Metrics
Views
1817
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-16
Citations