Publication:
Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T21:15:25Z | |
| dc.date.available | 2021-10-14T21:15:25Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6122 | |
| dc.source.beginpage | 2407 | |
| dc.source.endpage | 2409 | |
| dc.source.issue | 13 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 80 | |
| dc.title | Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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