Show simple item record

Carrier illumination for monitoring of CMOS ultra-shallow junctions

dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorLindsay, Richard
dc.contributor.authorBorden, P.
dc.contributor.authorBudiarto, E.
dc.date.accessioned2021-10-14T21:15:30Z
dc.date.available2021-10-14T21:15:30Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6123
dc.sourceIIOimport
dc.titleCarrier illumination for monitoring of CMOS ultra-shallow junctions
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium E: Advanced Characterisation of Semiconductor Materials and Devices
dc.source.conferencedate18/06/2002
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record