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Line edge roughness: characterization, modeling and impact on device behavior

dc.contributor.authorCroon, Jeroen
dc.contributor.authorStorms, Greet
dc.contributor.authorWinkelmeier, Stephanie
dc.contributor.authorPollentier, Ivan
dc.contributor.authorErcken, Monique
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorSansen, Willy
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T21:18:22Z
dc.date.available2021-10-14T21:18:22Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6157
dc.sourceIIOimport
dc.titleLine edge roughness: characterization, modeling and impact on device behavior
dc.typeProceedings paper
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage307
dc.source.endpage310
dc.source.conferenceIEDM Technical Digest
dc.source.conferencedate9/12/2002
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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