Thin gate dielectrics for deep subhalf micron ICs
| dc.contributor.author | Depas, Michel | |
| dc.date.accessioned | 2021-09-29T13:05:38Z | |
| dc.date.available | 2021-09-29T13:05:38Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/618 | |
| dc.source | IIOimport | |
| dc.title | Thin gate dielectrics for deep subhalf micron ICs | |
| dc.type | Meeting abstract | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 9 | |
| dc.source.conference | 23rd Electronic Materials Symposium | |
| dc.source.conferencedate | 20/03/1995 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| imec.availability | Published - open access |