Microroughness of clean silicon surfaces and gate oxide breakdown

Thumbnail
View/open
Metadata
Show full item record
Authors
Depas, Michel; Crossley, A.; Vermeire, Bert; Mertens, Paul; Sofield, C. J.; Heyns, Marc
Conference
26th IEEE Semiconductor Interface Specialists' Conference
Title
Microroughness of clean silicon surfaces and gate oxide breakdown
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections