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Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives

dc.contributor.authorDe Smedt, Frank
dc.contributor.authorVankerckhoven, Hans
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-14T21:24:06Z
dc.date.available2021-10-14T21:24:06Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6214
dc.sourceIIOimport
dc.titleCan we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
dc.typeOral presentation
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceUCPSS - Ultra Clean Processing Technology Symposium
dc.source.conferencedate16/09/2002
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - imec


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