Authors

De Witte, Hilde; Passefort, Sophie; Besling, Wim; Maes, Jos; Eason, K.; Young, Edward; Heyns, Marc

Conference

201st Meeting of the Electrochemical Society. Rapid Thermal and Other Short Time Processing Technologies III

Title

In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD

Publication type

Meeting abstract