| dc.contributor.author | Depas, Michel | |
| dc.contributor.author | Vermeire, Bert | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Heyns, Marc | |
| dc.date.accessioned | 2021-09-29T13:05:43Z | |
| dc.date.available | 2021-09-29T13:05:43Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/622 | |
| dc.source | IIOimport | |
| dc.title | Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 125 | |
| dc.source.endpage | 128 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.issue | 1_4 | |
| dc.source.volume | 28 | |
| imec.availability | Published - open access | |
| imec.internalnotes | Proceedings of the 9th Biennial Conference on Insulating Films on Semiconductors, June 7-10, 1995, Villard-de-Lans, France | |
