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Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide
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Authors
Depas, Michel
;
Vermeire, Bert
;
Mertens, Paul
;
Heyns, Marc
Issue
1_4
Journal
Microelectronic Engineering
Volume
28
Title
Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide
Publication type
Journal article
Embargo date
9999-12-31
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