Publication:

Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide

Date

1995
Journal article
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dc.contributor.authorDepas, Michel
dc.contributor.authorVermeire, Bert
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-09-29T13:05:43Z
dc.date.available2021-09-29T13:05:43Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/622
dc.source.beginpage125
dc.source.endpage128
dc.source.issue1_4
dc.source.journalMicroelectronic Engineering
dc.source.volume28
dc.title

Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide

dc.typeJournal article
dspace.entity.typePublication
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