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IMEC's research program and the ITRS challenges

dc.contributor.authorDeclerck, Gilbert
dc.date.accessioned2021-10-14T21:27:07Z
dc.date.available2021-10-14T21:27:07Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6241
dc.sourceIIOimport
dc.titleIMEC's research program and the ITRS challenges
dc.typeProceedings paper
dc.contributor.imecauthorDeclerck, Gilbert
dc.source.peerreviewno
dc.source.beginpage52
dc.source.endpage66
dc.source.conferenceSemiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology
dc.source.conferencedate12/05/2002
dc.source.conferencelocationPhildelphia, PA USA
imec.availabilityPublished - imec
imec.internalnotesElectrochemical Society Proceedings; Vol. 2002-2


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