dc.contributor.author | Duhayon, Natasja | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Xu, Mingwei | |
dc.contributor.author | Fouchier, Marc | |
dc.contributor.author | Alvarez, David | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Hellemans, L. | |
dc.date.accessioned | 2021-10-14T21:33:39Z | |
dc.date.available | 2021-10-14T21:33:39Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6294 | |
dc.source | IIOimport | |
dc.title | Two-dimensional dopant profiling using scanning probe microscopy | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Duhayon, Natasja | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.conference | Recent Developments in Nanoscience | |
dc.source.conferencedate | 11/01/2002 | |
dc.source.conferencelocation | Brussel Belgium | |
imec.availability | Published - imec | |