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Line edge roughness and its increasing importance

dc.contributor.authorErcken, Monique
dc.contributor.authorStorms, Greet
dc.contributor.authorDelvaux, Christie
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorLeunissen, Peter
dc.contributor.authorPollentier, Ivan
dc.date.accessioned2021-10-14T21:35:35Z
dc.date.available2021-10-14T21:35:35Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6309
dc.sourceIIOimport
dc.titleLine edge roughness and its increasing importance
dc.typeOral presentation
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.source.peerreviewno
dc.source.conference39th Interface Symposium
dc.source.conferencedate22/09/2002
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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