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Narrow trench corrosion

dc.contributor.authorErnur, Didem
dc.contributor.authorKondo, Seiichi
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:35:59Z
dc.date.available2021-10-14T21:35:59Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6312
dc.sourceIIOimport
dc.titleNarrow trench corrosion
dc.typeProceedings paper
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage503
dc.source.endpage507
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec


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