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Thin-film aerogel porosity and stiffness characterized by surface acoustic wave spectroscopy

dc.contributor.authorFlannery, C.M.
dc.contributor.authorMurray, C.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorStreiter, I.
dc.contributor.authorSchultz, S.E>
dc.date.accessioned2021-10-14T21:37:53Z
dc.date.available2021-10-14T21:37:53Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6326
dc.sourceIIOimport
dc.titleThin-film aerogel porosity and stiffness characterized by surface acoustic wave spectroscopy
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpageL12.7
dc.source.conferenceMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II
dc.source.conferencedate16/04/2001
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 714E (Online Proceedings)


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