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Strength-porosity relationship of nanoporous MSSQ films characterized by Brillouin light scattering and surface acoustic wave spectrosopy

dc.contributor.authorFlannery, C.M.
dc.contributor.authorWittkowski, T.
dc.contributor.authorJung, K.
dc.contributor.authorHillebrands, B.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-14T21:38:01Z
dc.date.available2021-10-14T21:38:01Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6327
dc.sourceIIOimport
dc.titleStrength-porosity relationship of nanoporous MSSQ films characterized by Brillouin light scattering and surface acoustic wave spectrosopy
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage343
dc.source.endpage354
dc.source.conferenceSilicon Materials - Processing, Characterization, and Reliability
dc.source.conferencedate1/04/2002
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 716


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